R&D and Field Evaluation of High Efficiency (Removal Performance & Energy Efficiency) Abatement System for PFCs and NF3, Exhaust Gases
from Electronics Industry
First phase R&D fund
$7.24 million (Government: $5.34 million, Private: $1.9 million)
R&D Organization
Expected Benefits
- Market penetration and import substitution based on unique, advanced CF4 removal technology
- Acquisition of eco-friendly pre-treatment technology for preparation of domestic and foreign environmental regulations
- Development of technologies applicable to new and existing manufacturing facilities of semiconductor, LCD, and solar cell production lines
