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HOMEMajor ProjectsFluorinated Gas Reduction Technology

Message

  • Development of Integral Management System for Separation, Purification, Recovery, and Recycling of Fluorinated Gases Emitted from Electronics Industry
  • Development of high-efficiency system for treatment of Non-CO2 gas (SF6) emitted by semiconductor industry etching process using catalyst and high ionization energy, and research on CDM manual certification
  • Development of the High Efficiency Abatement System for PFCs and NF3 Via Excess Enthalpy Combustion and Concentration Technology
  • Development of Thermal Treatment and Pollution Control Technology for Used HFCs

Development of Integral Management System for Separation, Purification, Recovery, and Recycling of Fluorinated Gases Emitted from Electronics Industry

FINETECH Co., Ltd.

Development of a carbon molecular sieve (CMS)-based integral management system for separation, recovery, and recycling of fluorinated gases emitted from electronics industry

First phase R&D fund

$7.24 million (Government: $5.34 million, Private: $1.9 million)

R&D Organization

R&D Contents

  • Development of CMS separation membranes for fluorinated gases (F-gases) emitted from electronics manufacturing processes
  • Development of a state-of-the-art pretreatment process for the recovery of F-gases emitted from electronics manufacturing processes
  • Development of an F-gas separation-purification-recovery integral system

Expected Benefits

  • The reduction of 1 million tons/year CO2-eq.
  • Acquisition of global standards in the field of F-gas separation/recovery and treatment process
  • Substantial contribution to enhancing Korea’s competitive advantage in the global semiconductor market

Recycling process following F-gas separation